Diaphragm vacuum valve

Exhibit no. 304

Diaphragm valves are robust low-cost vacuum valves for venting, regulating flow volume (called throttling) and isolation in low vacuum range. 

The flow control element is a flexible membrane that is deformed to close the fluid path. The screw thread mechanism is isolated from the vacuum system by the membrane, which results in extremely rugged valves. Because the diaphragm valve is symmetrical, either end can be the inlet.

The exhibit is Metrovac 1/2” diaphragm valve from the MS902 double-focusing mass spectrometer manufactured by AEI Scientific Apparatus Ltd. in 1969. It was mounted on a rotary pump inlet pipeline, between an electromagnetic isolation valve and a diffusion pump.

Wikipedia: Pressure measurement

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